کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812808 | 1518120 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of deposition parameters on the properties of sputtered Ge2Sb2Te5 films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The influence of deposition parameters such as the power applied to the target and the argon pressure during sputtering on the resulting properties of Ge2Sb2Te5 films has been investigated. Independent of deposition parameters all films deposited at room temperature were amorphous. Nevertheless X-ray reflectance showed a pronounced dependence of the rate upon the argon pressure in excellent agreement with the Keller-Simmons model. Furthermore, the film density also decreased with increasing argon pressure. This led to a corresponding change of the optical properties as revealed by spectroscopic ellipsometry. The crystallization temperature decreased with decreasing film density as revealed by measurements of the electrical resistivity.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 478, Issues 1â2, 1 May 2005, Pages 248-251
Journal: Thin Solid Films - Volume 478, Issues 1â2, 1 May 2005, Pages 248-251
نویسندگان
Henning Dieker, Matthias Wuttig,