Silicon-containing copolymers of MMA tested for a positive-tone high-resolution bi-layer e-beam resist system Fulltext Access 6 Pages 2005
A new charge-trapping nonvolatile memory based on the re-oxidized nitrous oxide Fulltext Access 6 Pages 2005
Influence of the oxidation in the metal silicide/Si3N4 interfaces on the etching profile Fulltext Access 6 Pages 2005
Fabrication of vacuum tube arrays with a sub-micron dimension using anodic aluminum oxide nano-templates Fulltext Access 6 Pages 2005
Study of PECVD SiOxNy films dielectric properties with different nitrogen concentration utilizing MOS capacitors Fulltext Access 6 Pages 2005
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches Fulltext Access 6 Pages 2005
Excited states and infrared transition energies of a donor impurity in cylindrical GaAs-Ga0.6Al0.4As quantum well wires under the action of an applied magnetic field Fulltext Access 6 Pages 2005
Oxygen pressure dependence of physical and electrical properties of LaAlO3 gate dielectric Fulltext Access 6 Pages 2005
Simultaneous suppression of overlap errors and side-lobes in attenuated PSM lithography by rule-based OPC Fulltext Access 6 Pages 2005
Development of impedance biosensors with nanometer gaps for marker-free analytical measurements Fulltext Access 6 Pages 2005
Full wafer scale near zero residual nano-imprinting lithography using UV curable monomer solution Fulltext Access 6 Pages 2005
Three-dimensional simulation of resist pattern deformation by surface tension at the drying process Fulltext Access 6 Pages 2005
Simplified resist models for efficient simulation of contact holes and line ends Fulltext Access 6 Pages 2005
A single layer negative tone lift-off photo resist for patterning a magnetron sputtered Ti/Pt/Au contact system and for solder bumps Fulltext Access 6 Pages 2005
Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography Fulltext Access 6 Pages 2005
Growth and characterisation of birefringent films on textured silicon substrates Fulltext Access 6 Pages 2005
Evaluation of intrinsic film stress distributions from induced substrate deformation Fulltext Access 6 Pages 2005
A single-step process for making nanofluidic channels using electron beam lithography Fulltext Access 6 Pages 2005
Nanomanipulation and aggregation limitations of self-assembling structural proteins Fulltext Access 6 Pages 2005
Roughness of amorphous/crystalline interface in pre-amorphization implantation: Molecular dynamic simulation and modeling Fulltext Access 6 Pages 2005
Enhanced current gain in SiC power BJTs using a novel surface accumulation layer transistor concept Fulltext Access 6 Pages 2005
Air-bridge interconnection and bondpad process for non-planar compound semiconductor devices Fulltext Access 6 Pages 2005
Ferroelectric and leakage current characteristics of (Pb0.72La0.28)Ti0.93O3 thin films prepared by a sol-gel process Fulltext Access 6 Pages 2005
Detection of open or closed porosity in low-κ dielectrics by solvent diffusion Fulltext Access 6 Pages 2005
Studies of Ti- and Ni-germanide Schottky contacts on n-Ge(1Â 0Â 0) substrates Fulltext Access 6 Pages 2005
Cubic InGaN/GaN multi-quantum wells and AlGaN/GaN distributed Bragg reflectors for application in resonant cavity LEDs Fulltext Access 6 Pages 2005
Investigation of electromagnetic radiation induced by conducting wire of nanometer multi-quantum well device on InGaN LED Fulltext Access 6 Pages 2005
Fabrication and characterisation of high quality ZnO thin films by reactive electron beam evaporation technique Fulltext Access 6 Pages 2005
Fabrication of patterned magnetic nanodots by laser interference lithography Fulltext Access 6 Pages 2005
Dark current characteristics of thermally treated contacts on GaN-based ultraviolet photodetectors Fulltext Access 6 Pages 2005
Stability of information stored in nanoscopic arrays of ferromagnetic posts Fulltext Access 6 Pages 2005
Magnetic field induced optical variation in nanosize iron oxide fluid-particles Fulltext Access 6 Pages 2005
Epitaxial nanostructures assembled on InSb(0Â 0Â 1) by submonolayer deposition of gold Fulltext Access 6 Pages 2005
Optimization of Schottky barrier carbon nanotube field effect transistors Fulltext Access 6 Pages 2005
Binding energy calculation of excitonic trions in spherical quantum dots with the quantum adiabatic theorem Fulltext Access 6 Pages 2005
The electronic and atomic structure of SrTiO3, BaTiO3, and PbTiO3(0Â 0Â 1) surfaces: Ab initio DFT/HF hybrid calculations Fulltext Access 6 Pages 2005
Application of high-κ gate dielectrics and metal gate electrodes to enable silicon and non-silicon logic nanotechnology Fulltext Access 6 Pages 2005
Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon Fulltext Access 6 Pages 2005
Microfabricated textured surfaces for super-hydrophobicity investigations Fulltext Access 6 Pages 2005
Surface mass spectrometric analysis of SiCl4/SiF4/O2 dry etch gate recessed 120Â nm T-gate GaAs pHEMTs Fulltext Access 6 Pages 2005
Double-island single-electron transistor operated at radio-frequency for sensitive and fast charge detection Fulltext Access 6 Pages 2005
Topside release of atomic force microscopy probes with molded diamond tips Fulltext Access 6 Pages 2005
Electron beam lithography for nanometer-scale planar double-gate transistors Fulltext Access 6 Pages 2005
Geometry dependence of the energy levels in silicon isolated double quantum-dots Fulltext Access 6 Pages 2005
Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold Fulltext Access 6 Pages 2005
Characterization of pneumatically activated microvalves by measuring electrical conductance Fulltext Access 6 Pages 2005
Dry release fabrication and testing of SiC electrostatic cantilever actuators Fulltext Access 6 Pages 2005
The restoration of porous methylsilsesquioxane (p-MSQ) films using trimethylhalosilanes dissolved in supercritical carbon dioxide Fulltext Access 7 Pages 2005
Impact of reducing resist stripping processes at elevated temperature on ULK and HM materials Fulltext Access 7 Pages 2005
High manufacturability Cu multilevel interconnects featuring hybrid-NCS structure Fulltext Access 7 Pages 2005
Impact of patterning and ashing on electrical properties and reliability of interconnects in a porous SiOCH ultra low-k dielectric material Fulltext Access 7 Pages 2005
Structural and surface properties of NiCr thin films prepared by DC magnetron sputtering under variation of annealing conditions Fulltext Access 7 Pages 2005
Role of local microchemistry and surface structure in electrical resistivity of 50Â nm electroless films Ag-W-oxygen Fulltext Access 7 Pages 2005
Self-annealing and aging effect characterization on copper seed thin films Fulltext Access 7 Pages 2005
Carbon nanotubes grown using cobalt silicide as catalyst and hydrogen pretreatment Fulltext Access 7 Pages 2005
Integration of metal insulator metal capacitors (MIM-Caps) with low defectivity into a copper metallization Fulltext Access 7 Pages 2005
Optimization of shear test for flip chip solder bump using 3-dimensional computer simulation Fulltext Access 7 Pages 2005
Impact of introducing CuSiN self-aligned barriers in advanced copper interconnects Fulltext Access 7 Pages 2005
Model for the barrier diffusion into Cu interconnects at high temperatures Fulltext Access 7 Pages 2005
Low and room temperature studies of RF to DC rectifiers based on ballistic transport Fulltext Access 7 Pages 2005
Charge injection spectroscopy of Alq3 thin films deposited on bare and LiF-modified metal substrates Fulltext Access 7 Pages 2005
Optical and structural properties of sol-gel derived materials embedded in porous anodic alumina Fulltext Access 7 Pages 2005
Electro-optical characterization of switchable Bragg gratings based on nematic liquid crystal-photopolymer composites with spatially ordered structure Fulltext Access 7 Pages 2005