Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force–distance curve measurements
Keywords: نیترید سیلیکون; Nanotribology; Force–distance curve; Adhesive force; Dielectric charging; Silicon nitride; Electrostatic NEMS/MEMS; RF MEMS switch; Reliability; Nanoscale characterization