Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method

► Ti doped DLC films (Ti ~ 24 at.% )were deposited by a hybrid ion beam system. ► Solubility of the Ti atoms in the DLC films was found around 7 ~ 13 at .%. ► Microstructure evolution from DLC to nanocomposite played key role in film behaviors.