Growth and characterization of Ba(Cd1/3Ta2/3)O3 thin films

► Stoichiometric and epitaxial Ba(Cd1/3Ta2/3)O3 (BCT) thin films were grown. ► Cd enriched targets and higher substrate temperature achieve high quality BCT films. ► Structural, optical and electrical properties of BCT thin films were characterized. ► The bandgap of BCT was determined based on optical measurement.