Preparation of porous Fe2O3/SiO2 nanocomposite abrasives and their chemical mechanical polishing behaviors on hard disk substrates

► Porous Fe2O3/SiO2 particles were prepared as abrasives. ► Fe as active element improved material removal rate (MRR) in polishing. ► MRR increased with the increase of the molar content of iron in porous Fe2O3/SiO2.