Line defects, planar defects and voids in SrTiO3 films grown on MgO by pulsed laser and pulsed laser interval deposition

► Pulsed laser interval deposition enhances the 2D growth of SrTiO3 films on MgO. ► Defect content of films tailored using different growth modes. ► 2D growth enhances the formation of holes and antiphase boundaries. ► 3D growth mode enhances the formation of threading and misfit dislocations.