کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10670533 | 1008868 | 2011 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The properties of radio frequency sputtered transparent and conducting ZnO:F films on polyethylene naphthalate substrate
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کلمات کلیدی
Sputtering - اسپری کردنFlexible electronics - الکترونیک انعطاف پذیرTransparent conducting oxide - اکسید رسانای شفافZinc oxide - اکسید رویElectrical properties and measurements - خواص الکتریکی و اندازه گیریoptical properties - خواص نوریRutherford backscattering spectroscopy - طیف سنجی برگشت رادرفوردThin films - فیلم های نازکPolyethylene naphthalate - پلی اتیلن نفتالیت
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report on the properties of ZnO:F films deposited by RF sputtering on polyethylene naphthalate (PEN) substrates and compared them with films deposited on glass. Detailed and systematic investigations of various properties of films were deposited on PEN substrates were carried out as functions of thickness and annealing ambient. The films were deposited at room temperature and annealed at 150 °C in either Ar or 7% H2/Ar ambients. These films exhibited carrier concentrations between 2 Ã 1018/cm3 and 9.5 Ã 1019/cm3, mobility between 3 and 11 cm2/V-s, and resistivity between 10â 1 and 10â 2 Ω-cm. Hall mobility variation with concentration has been explained assuming ionized impurity and lattice scattering to be the dominant mechanisms. The transmission of the films varied from 68 to 80% with increasing thickness and the absorption edge was limited by the absorption of the PEN substrate. The mechanical flexibility of the films was measured in terms of its critical radius of bending which was determined from the onset of a sharp increase in electrical resistance. The critical radius varied between 6.5 and 17 mm for film thicknesses varying from 20 to 200 nm. The thickness dependence of critical strain and critical radius can be explained by Griffith defect theory.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 519, Issue 6, 3 January 2011, Pages 1809-1816
Journal: Thin Solid Films - Volume 519, Issue 6, 3 January 2011, Pages 1809-1816
نویسندگان
A. Bowen, J. Li, J. Lewis, K. Sivaramakrishnan, T.L. Alford, S. Iyer,