Initial stages of WO3 growth on silicon substrates

Ultrathin films (5 nm, 10 nm and 20 nm effective thickness) of WO3 have been deposited in high vacuum (10− 6 Torr) onto single crystal Si(100) substrates and studied with X-ray diffraction, atomic force microscopy, scanning tunneling microscopy and spectroscopy. The experiments have been carried out on “as-deposited” thin films or after 1 h post-deposition annealing at various temperatures (ranging from 300 °C to 500 °C). A size induced increase of the amorphous to crystalline (monoclinic) phase transition has been observed for the 5 nm and 10 nm films, with a critical crystallite size of 25 ± 5 nm and a critical temperature of 345 ± 5 °C. All the experimental evidences show that, upon annealing, there is a diffusion limited aggregation growth of WO3 that forms large flat two-dimensional islands composed by aggregates of individual crystallites approximately uniform in size and shape. These islands are isolated in the 5 nm thin films, are connected in the 10 nm case and form a uniform patchwork in the 20 nm thin films. Scanning tunneling spectroscopy shows the opening of a large surface band gap (2.7 eV) in the 500 °C annealed films and the significant presence of in gap states for thin films prepared with a lower (below 400 °C) annealing temperature. These findings are discussed in view of the optimization of the best morphological, structural and electronic parameters to fabricate WO3 gas sensing devices at the sub-micrometer length scale.