کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1669658 1008887 2010 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Titanium diffusion in gold thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Titanium diffusion in gold thin films
چکیده انگلیسی

In the present study, diffusion phenomena in titanium/gold (Ti/Au) thin films occurring at temperatures ranging between 200 and 400 °C are investigated.The motivation is twofold: the first objective is to characterize Ti diffusion into Au layer as an effect of different heat-treatments. The second goal is to prove that the implementation of a thin titanium nitride (TiN) layer between Ti and Au can remarkably reduce Ti diffusion.It is observed that Ti atoms can fully diffuse through polycrystalline Au thin films (260 nm thick) already at temperatures as a low as 250 °C. Starting from secondary ion mass spectroscopy data, the overall diffusion activation energy ΔE = 0.66 eV and the corresponding pre-exponential factor D0 = 5 × 10− 11 cm2/s are determined. As for the grain boundary diffusivity, both the activation energy range 0.54 < ΔEgb < 0.66 eV and the pre-exponential factor s0Dgb0 = 1.14 × 10− 8 cm2/s are obtained. Finally, it is observed that the insertion of a thin TiN layer (40 nm) between gold and titanium acts as an effective diffusion barrier up to 400 °C.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 10, 1 March 2010, Pages 2585–2591
نویسندگان
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