کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670506 1008900 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Physical properties of hydrogenated Al-doped ZnO thin layer treated by atmospheric plasma with oxygen gas
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Physical properties of hydrogenated Al-doped ZnO thin layer treated by atmospheric plasma with oxygen gas
چکیده انگلیسی

Hydrogenated Al-doped ZnO (H:AZO) thin films were deposited on glass substrates at room temperature by radio-frequency magnetron sputtering at various hydrogen flow rates. The addition of hydrogen improved the resistivity of the H:AZO films significantly. A thin insulating layer was produced on H:AZO films by atmospheric pressure plasma with Ar/O2 reactive gas. The resistivity degenerated and the optical band gap of the oxygen plasma-treated H:AZO films decreased from 3.7 eV to 3.4 eV. This was attributed to a decrease in the hydrogen concentration at the film surface according to elemental depth analysis.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 14, 3 May 2010, Pages 4066–4070
نویسندگان
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