کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671412 | 1008916 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Interaction between hydrogen plasma and hydrogenated amorphous carbon films was investigated. The changes in the bonding configuration of the hydrocarbon species due to the hydrogen plasma treatments were investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). Further, to reinforce the results, etching rates were also investigated. These results suggested that the hydrogen ions generated in the plasma physically etched the amorphous carbon film at the high rate; on the other hand, the hydrogen radicals also etched the hydrogenated film at the low rate through hydrogenation of the film.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 13, 1 May 2008, Pages 4379-4383
Journal: Thin Solid Films - Volume 516, Issue 13, 1 May 2008, Pages 4379-4383
نویسندگان
Masanori Shinohara, Ken Cho, Hiromichi Shibata, Keishi Okamoto, Tatsuyuki Nakatani, Yoshinobu Matsuda, Hiroshi Fujiyama,