Voltage tunable Ba0.6Sr0.4TiO3 thin films and coplanar phase shifters

Not only the ferroelectric properties of Ba0.6Sr0.4TiO3 thin films but also the design, fabrication and microwave properties of coplanar waveguide (CPW) phase shifter were investigated. When the applied voltage changes from zero to 20 V range at a frequency of 1 kHz, the dielectric constant, tunability, remanent polarization (2Pr) and coercive electric field (Ec) of the BST films are 1266, 29.5%, 2.29 μC/cm2 and 22.27 kV/cm, respectively. The structure of CPW phase shifter was designed by ANSOFT High Frequency Structure Simulator (HFSS) and Agilent Advanced Design System (ADS). The designed phase shifter consists of 56 same sections. It is observed from the photograph of the fabricated device that the lines of electrodes are regular and the widths of bottom electrodes overlapped by top electrodes are about 5 μm. It was found that the phase shift gradually increases as the voltage increases from 0 V to 20 V, which may be due to the tunability of BST films varies with external dc field. About 168° phase shift was achieved at 28 GHz with a bias voltage of 20 V.