کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1675445 | 1008979 | 2006 | 5 صفحه PDF | دانلود رایگان |
The deformation behaviour of diamond-like carbon (DLC) coatings on silicon substrates induced by indentation has been investigated. DLC coatings, deposited by a plasma-assisted chemical vapour deposition technique, were subjected to nanoindentation over a range of maximum loads from 100 mN to 300 mN. The resulting load-displacement plots displayed pop-ins for maximum loads of 200 mN and above, with no distinct pop-out for any of the loads studied. Compressive deformation of the coating, up to a strain of ∼ 9%, was observed. The coating–substrate composite was devoid of cracks at lower loads, but at the maximum load of 300 mN, ring cracks in the coating and a median crack in the substrate were observed. Furthermore, cracking, {111} slip and localized phase transformations were observed in the silicon substrate. The onset of these structural changes was correlated to the mechanical behaviour during indentation.
Journal: Thin Solid Films - Volume 515, Issue 3, 23 November 2006, Pages 1000–1004