کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1675610 1008982 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
ZnO transparent thin films for gas sensor applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
ZnO transparent thin films for gas sensor applications
چکیده انگلیسی

Zinc oxide (ZnO) transparent thin films were deposited onto silicon and Corning glass substrates by dc magnetron sputtering using metallic and ceramic targets. Surface investigations carried out by Atomic Force Microscopy (AFM) and X-ray Diffraction (XRD) have shown a strong influence of deposition technique parameters on film surface topography. Film roughness (RMS), grain shape and dimensions are correlated with the deposition technique parameters as well as with the target material. XRD measurements have proven that the dc sputtered films are polycrystalline with the (002) as preferential crystallographic orientation. AFM analysis of thin films sputtered from a ceramic target has shown a completely different surface behavior compared with that of the films grown from a metallic target. This work demonstrates that the target material and the growth conditions determine the film surface characteristics. The gas sensing characteristics of these films are strongly influenced by surface morphology. Thus correlating the optical and electrical film properties with surface parameters (i.e. RMS and Grain Radius) can lead to an enhancement of the material's potential for gas sensing applications.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issue 2, 25 October 2006, Pages 551–554
نویسندگان
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