Ultraviolet photodetector and gas sensor based on amorphous In-Ga-Zn-O film

The IGZO thin films were also tested for use as gas sensors. When attached by ozone molecules, the resistance of the film altered as a result of electron transfer from the film to the gas molecules. The fabricated IGZO films can detect ozone to the ppb level. Our results showed that IGZO thin films were capable of sensing both ozone gas and UV light with high sensitivity.