کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812478 | 1518114 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of oxygen pressure on lattice parameter, orientation, surface morphology and deposition rate of (Ba0.02Sr0.98)TiO3 thin films grown on MgO substrate by pulsed laser deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effects of oxygen pressure on lattice parameter, orientation, surface morphology and deposition rate of (Ba0.02Sr0.98)TiO3 thin films grown on MgO substrate by pulsed laser deposition Effects of oxygen pressure on lattice parameter, orientation, surface morphology and deposition rate of (Ba0.02Sr0.98)TiO3 thin films grown on MgO substrate by pulsed laser deposition](/preview/png/9812478.png)
چکیده انگلیسی
(Ba0.02Sr0.98)TiO3 thin films were grown on MgO substrate by pulsed laser deposition (PLD) techniques at various oxygen pressures from 40 to 10â 3 Pa. Effects of oxygen pressure on lattice parameter, orientation, surface morphology and deposition rate of the thin films were investigated. X-ray diffraction patterns indicate that, with decreasing oxygen pressure, crystal orientation of the thin films develops from (110) preferred orientation to random orientation, and finally to perfectly (00l) texture. Meantime, lattice parameter of the thin films increases with decreasing oxygen pressure. Especially, perfectly (00l)-oriented (Ba0.02Sr0.98)TiO3 thin film was obtained under oxygen pressure of 10â 3 Pa at substrate temperature of 850 °C, in spite of the large lattice mismatch of about 8% between (Ba0.02Sr0.98)TiO3 and MgO. Atomic force microscopy images show that all the thin films have granular structure and the thin film grown at 10â 3 Pa has much more homogeneous grain size distribution compared to all the other thin films. Moreover, the films grown at oxygen pressures of 1 and 10â 1 Pa have more smooth surfaces, and the deposition rate of thin film increases with decreasing oxygen pressure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 82-89
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 82-89
نویسندگان
Can Wang Can Wang, B.L. Cheng, S.Y. Wang, H.B. Lu, Y.L. Zhou, Z.H. Chen, G.Z. Yang,