Ag(Ta,Nb)O3 thin-film interdigital capacitors for microwave applications Fulltext Access 5 Pages 2007
Investigation of Si/SiGe/Si heterostructure implanted by H ion and annealed in vacuum and dry O2 ambient Fulltext Access 5 Pages 2007
A p+/p-buffer/n-epi cmos compatible high-side RESURF LDMOS transistor for Power IC applications Fulltext Access 5 Pages 2007
Study on new structure uncooled a-Si microbolometer for infrared detection Fulltext Access 5 Pages 2007
Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon Fulltext Access 5 Pages 2007
Characteristics of a micromachined piezovalve combined with a multilayer ceramic actuator Fulltext Access 5 Pages 2007
Investigation of Zr–N thin films for use as diffusion barrier in Cu metallization Fulltext Access 5 Pages 2007
An ultra-high level second-order nonlinear optical susceptibility in strained asymmetric GaN–AlGaN–AlN quantum wells: Towards all-optical devices and systems Fulltext Access 5 Pages 2007
Parametric properties of the electron spin relaxation in InAs quantum dots Fulltext Access 5 Pages 2007
A systematic dry etching process for profile control of quantum dots and nanoconstrictions Fulltext Access 5 Pages 2007
Fabrication of a 3-dimensional microstructure by sequential anodic oxidation (SAO) Fulltext Access 5 Pages 2007
An optimal silicidation technique for electrostatic discharge protection sub-100 nm CMOS devices in VLSI circuit Fulltext Access 5 Pages 2007
Frequency and temperature dependent dielectric properties of Al/Si3N4/p-Si(1 0 0) MIS structure Fulltext Access 5 Pages 2007
Remote plasma etching of titanium nitride using NF3/argon and chlorine mixtures for chamber clean applications Fulltext Access 5 Pages 2007
Impact of line-edge roughness on resistance and capacitance of scaled interconnects Fulltext Access 5 Pages 2007
Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films Fulltext Access 5 Pages 2007
Platinum chemical mechanical polishing (CMP) characteristics for high density ferroelectric memory applications Fulltext Access 5 Pages 2007
Reliability of nickel flip chip bumps with a tin–silver encapsulation on a copper/tin–silver substrate during the bonding process Fulltext Access 5 Pages 2007
Macro-modeling for the compact simulation of single electron transistor using SIMPLORER Fulltext Access 5 Pages 2007
850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques Fulltext Access 5 Pages 2007
Investigation of polishing characteristics of shallow trench isolation chemical mechanical planarization with different types of slurries Fulltext Access 5 Pages 2007
Combined shear-force/field emission microscope for local electrical surface investigation Fulltext Access 5 Pages 2007
On the reliability of scanning probe based electrostatic force measurements Fulltext Access 5 Pages 2007
Reliability of SiO2 and high-k gate insulators: A nanoscale study with conductive atomic force microscopy Fulltext Access 5 Pages 2007
Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy Fulltext Access 5 Pages 2007
Quantitative analysis of thin film compositions using EFTEM combined with RBS and ERDA Fulltext Access 5 Pages 2007
Breakdown kinetics at nanometer scale of innovative MOS devices by conductive atomic force microscopy Fulltext Access 5 Pages 2007
Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfill Fulltext Access 5 Pages 2007
A comparative study on a high aspect ratio contact hole etching in UFC- and PFC-containing plasmas Fulltext Access 5 Pages 2007
Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology Fulltext Access 5 Pages 2007
Temperature and field-dependence of hopping conduction in organic semiconductors Fulltext Access 5 Pages 2007
Characterization of electrically active defects in high-k gate dielectrics by using low frequency noise and charge pumping measurements Fulltext Access 5 Pages 2007
Dual layer SrTiO3/HfO2 gate dielectric for aggressively scaled band-edge nMOS devices Fulltext Access 5 Pages 2007
Application of group electronegativity concepts to the effective work functions of metal gate electrodes on high-κ gate oxides Fulltext Access 5 Pages 2007
Performance assessment of (1 1 0) p-FET high-κ/MG: is it mobility or series resistance limited? Fulltext Access 5 Pages 2007
Hot-carrier damage from high to low voltage using the energy-driven framework Fulltext Access 5 Pages 2007
Non-classical hot-electron mechanism and its implications on the reliability and scalability of the high-κ dielectric N-MOS Flash memory cell Fulltext Access 5 Pages 2007
Oriented nanometer surface morphologies by thermal relaxation of locally cross-linked and stretched polymer samples Fulltext Access 5 Pages 2007
Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography Fulltext Access 5 Pages 2007
Optimization of demolding temperature for throughput improvement of nanoimprint lithography Fulltext Access 5 Pages 2007
Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press Fulltext Access 5 Pages 2007
Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material Fulltext Access 5 Pages 2007
A new way of manufacturing high resolution optical encoders by nanoimprint lithography Fulltext Access 5 Pages 2007
Fabrication of a polymeric photonic crystal wavelength splitter using ultra violet embossing technology Fulltext Access 5 Pages 2007
Nanotopography produced by using a vacuum pin chuck and the flattening ability around its periphery Fulltext Access 5 Pages 2007
Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography Fulltext Access 5 Pages 2007
Analysis of the diffraction pattern for optimal assist feature placement Fulltext Access 5 Pages 2007
The optical properties of monolayer amorphous Al2O3–TiO2 composite films used as HT-APSM blanks for ArF immersion lithography Fulltext Access 5 Pages 2007
20 nm Line/space patterns in HSQ fabricated by EUV interference lithography Fulltext Access 5 Pages 2007
Integration of HfxTayN metal gate with SiO2 and HfOxNy gate dielectrics for MOS device applications Fulltext Access 5 Pages 2007
Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique Fulltext Access 5 Pages 2007
Impact of surface preparation on nickel–platinum alloy silicide phase formation Fulltext Access 5 Pages 2007
Effects of nodule treatment of rolled copper on the mechanical properties of the flexible copper-clad laminate Fulltext Access 5 Pages 2007
Hybrid punch through approach to address electroless related integration issues of hybrid CoWP/SiCN barriers Fulltext Access 5 Pages 2007
Evaluation of a PECVD advanced barrier (k = 3.7) for 32 nm CMOS technology and below Fulltext Access 5 Pages 2007
Damageless Cu chemical mechanical polishing for porous SiOC/Cu interconnects Fulltext Access 5 Pages 2007
Seed layer enhancement by electrochemical deposition: The copper seed solution for beyond 45 nm Fulltext Access 5 Pages 2007
An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices Fulltext Access 5 Pages 2007
Characterization of CMOS sub-65 nm metallic contact by laser scattering: Thermal stability of Ni(Si1−xGex) Fulltext Access 5 Pages 2007
Thermal stability of NiPt- and Pt-silicide contacts on SiGe source/drain Fulltext Access 5 Pages 2007
Roughness improvement of the CoSi2/Si-interface for an application as buried silicide Fulltext Access 5 Pages 2007
Silicide pre-clean effects on NiPtSi thermal stability for 65 nm technologies and beyond Fulltext Access 5 Pages 2007
NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(1 0 0) Fulltext Access 5 Pages 2007
Comparison of the agglomeration behavior of Ag(Al) films and Ag(Au) films Fulltext Access 5 Pages 2007
Creation mechanism of metal depression in sputtering process for aluminum interconnects Fulltext Access 5 Pages 2007
Electroless deposition and electrical resistivity of sub-100 nm Cu films on SAMs: State of the art Fulltext Access 5 Pages 2007
Photosensitive poly(dimethylsiloxane) materials for microfluidic applications Fulltext Access 5 Pages 2007
Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS Fulltext Access 5 Pages 2007
Suppression of pinhole defects in fullerene molecular electron beam resists Fulltext Access 5 Pages 2007