
Effects of the electric bias on the deposition behavior of silicon films on glass during hot-wire chemical vapor deposition
Keywords: A1 تعیین مشخصات; 68.55.Jk; 81.07.Bc; 81.10.Bk; 81.15.Gh; A1. Characterization; A1. Crystallites; A1. Electric bias; A3. Chemical vapor deposition processes; B2. Semiconducting silicon;