
Emissivity-correcting mid-infrared pyrometry for group-III nitride MOCVD temperature measurement and control
Keywords: B1 نیترید گالیم; 7.20.Ka; 81.15.Gh; 68.47.FgA2. Metalorganic chemical vapor deposition; A2. Metalorganic vapor phase epitaxy; A3. Pyrometry; A3. Organometallic vapor phase epitaxy; B1. Indium gallium nitride; B1. Gallium nitride; B1. Indium nitride