کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5466027 | 1517976 | 2017 | 19 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Shape-controlled fabrication of nanopatterned samarium-doped cerium oxide thin films using ultraviolet nanoimprint lithography
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
Ultraviolet nanoimprint lithographyPerfluoropolyetherSamarium dopingSOFCFESEMEDXPFPENanopatternSDCYSZEnergy-Dispersive X-ray Spectroscopy - اشعه ماوراء بنفش اشعه ایکس انرژیCerium oxide - اکسید سریمCalcination - تکلیس ( کُشته سازی)Yttrium-stabilized zirconia - زیرکونیا تثبیت شده ییتیومSol-gel - سل ژلsolid oxide fuel cell - سلول سوختی اکسید جامدNanoimprint lithography - لیتوگرافی نانو چاپ، طرح نگار نانو چاپیField emission scanning electron microscopy - میکروسکوپ الکترونی منتشر کننده انتشار میدانX-ray diffraction - پراش اشعه ایکسXRD - پراش اشعه ایکسfuel cell - پیل سوختی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A shape-controlled method for the nanoscale patterning of cerium oxide thin films was demonstrated in this work. An ultraviolet-curable precursor-containing resin was newly developed for samarium-doped and undoped cerium oxide films, and ultraviolet nanoimprint lithography was employed for the nanopatterning. Various nanostructure shapes such as lines, circular pillars, and circular holes were fabricated, and a minimum feature width of 45Â nm was realized by patterning and subsequently shrinking the structures. The fabricated film was confirmed to be cerium dioxide, both undoped and doped with Sm. The effects of the annealing temperature on the crystallinity of the nanostructure and the controllability of the doping ratio were investigated. We believe that this work will provide a new path for preparing nanostructured cerium oxide for energy applications and a basic platform for analyzing the relationship between the structure and performance of size-controlled nanostructures.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 636, 31 August 2017, Pages 552-557
Journal: Thin Solid Films - Volume 636, 31 August 2017, Pages 552-557
نویسندگان
Jihye Lee, Sohee Cheon, Jun-Hyuk Choi, Dae-Geun Choi, Joo-Yun Jung, Sohee Jeon, Eung-sug Lee, Jun-Ho Jeong,