Suppression of boron transient enhanced diffusion in silicon and silicon germanium by fluorine implantation Fulltext Access 7 Pages 2005
Monitoring of silicon solar cell technology via the surface photovoltage method Fulltext Access 7 Pages 2005
Effect of Ar plasma treatment on the photo-electrical properties of nanocrystal TiO2 films Fulltext Access 7 Pages 2005
Lowering of thickness of boron-doped microcrystalline hydrogenated silicon film by seeding technique Fulltext Access 7 Pages 2005
Method for the diagnostic evaluation of thin-film solar modules based on I-V measurement using a line light source Fulltext Access 7 Pages 2005
Comparison of normal and inverse poly(3-hexylthiophene)/fullerene solar cell architectures Fulltext Access 7 Pages 2005
Optimal energy offsets for organic solar cells containing a donor/acceptor pair Fulltext Access 7 Pages 2005
Native oxide removal from SiGe using mixtures of HF and water delivered by aqueous, gas, and supercritical CO2 processes Fulltext Access 7 Pages 2005
Transient processes in single crystal solar cell panels: experimental investigation Fulltext Access 7 Pages 2005
Strained-silicon MOSFET process technology-control of impurity and germanium atoms at the hetero-interface Fulltext Access 7 Pages 2005
Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30Â nm MOS devices Fulltext Access 7 Pages 2005
Contour offset algorithm for precise patterning in two-photon polymerization Fulltext Access 7 Pages 2005
Chemical mechanical polishing performances by filtering and retreatment of used silica abrasives slurry Fulltext Access 7 Pages 2005
Monte-Carlo simulation of low-energy electron scattering in PMMA - using stopping powers from dielectric formalism Fulltext Access 7 Pages 2005
Investigation of useful or deleterious residual thermal stress component to the capacitance of a multilayer ceramic capacitor Fulltext Access 7 Pages 2005
Oxide-chemical mechanical polishing characteristics using silica slurry retreated by mixing of original and used slurry Fulltext Access 7 Pages 2005
A new type of low power thermoelectric micro-generator fabricated by nanowire array thermoelectric material Fulltext Access 7 Pages 2005
Influence of transient flow and solder bump resistance on underfill process Fulltext Access 7 Pages 2005
Study of structural and luminescent properties of high-quality ZnO thin films treatment with hydrogen peroxide solution Fulltext Access 7 Pages 2005
Series resistance calculation for Ag contacts on single crystal layered p-SnS and p-SnSe compound semiconductors in the wide temperature range Fulltext Access 7 Pages 2005
Characterization of ultra-thin SiO2 by capacitance-voltage and charge pumping measurements Fulltext Access 7 Pages 2005
Power performance and scalability study of AlGaAs/GaAs double-recessed pseudomorphic high electron mobility transistors on unthinned substrate for coplanar waveguide circuit applications Fulltext Access 7 Pages 2005
SOI planar photonic crystal fabrication: Etching through SiO2/Si/SiO2 layer systems using fluorocarbon plasmas Fulltext Access 7 Pages 2005
Characterization of electroplated copper self-annealing with investigations focused on incorporated impurities Fulltext Access 7 Pages 2005
Characteristics of chalcogenide nonvolatile memory nano-cell-element based on Sb2Te3 material Fulltext Access 7 Pages 2005
Profile control in high aspect ratio contact hole etching by a capacitively coupled plasma source Fulltext Access 7 Pages 2005
Effects of post-metallization annealing of high-K dielectric thin films grown by MOMBE Fulltext Access 7 Pages 2005
Thermal stability of tantalum nitride diffusion barriers for Cu metallization formed using plasma immersion ion implantation Fulltext Access 7 Pages 2005
Wafer deformation in ultraviolet-nanoimprint lithography using an element-wise patterned stamp Fulltext Access 7 Pages 2005
Wafer to wafer nano-imprinting lithography with monomer based thermally curable resin Fulltext Access 7 Pages 2005
Effects of oxidant additives for exact selectivity control of W- and Ti-CMP process Fulltext Access 7 Pages 2005
Structural, electrical and mechanical properties of templated silsesquioxane porous films Fulltext Access 7 Pages 2005
Design of FBG-based ultra-narrow asymmetric filter for transmission with 0.8 bit/s/Hz spectral efficiency without polarisation multiplexing Fulltext Access 7 Pages 2005
Straightforward fabrication of highly ordered TiO2 nanowire arrays in AAM on aluminum substrate Fulltext Access 7 Pages 2005
A graded diameter and oriented nanorod-thin film structure for solar cell application: a device proposal Fulltext Access 7 Pages 2005
Model for the barrier diffusion into Cu interconnects at high temperatures Fulltext Access 7 Pages 2005
BacSr1âcTiO3 perovskite solid solutions: Thermodynamics from ab initio electronic structure calculations Fulltext Access 7 Pages 2005
Amperometric DNA sensor using gold electrode modified with polymerized mediator by layer-by-layer adsorption Fulltext Access 7 Pages 2005
A three-dimensional simulation of electrostatic characteristics for carbon nanotube array field effect transistors Fulltext Access 7 Pages 2005
Electro-optical characterization of switchable Bragg gratings based on nematic liquid crystal-photopolymer composites with spatially ordered structure Fulltext Access 7 Pages 2005
Optical and structural properties of sol-gel derived materials embedded in porous anodic alumina Fulltext Access 7 Pages 2005
Charge injection spectroscopy of Alq3 thin films deposited on bare and LiF-modified metal substrates Fulltext Access 7 Pages 2005
Low and room temperature studies of RF to DC rectifiers based on ballistic transport Fulltext Access 7 Pages 2005
Impact of introducing CuSiN self-aligned barriers in advanced copper interconnects Fulltext Access 7 Pages 2005
Optimization of shear test for flip chip solder bump using 3-dimensional computer simulation Fulltext Access 7 Pages 2005
Integration of metal insulator metal capacitors (MIM-Caps) with low defectivity into a copper metallization Fulltext Access 7 Pages 2005
Gettering impurities from crystalline silicon by phosphorus diffusion using a porous silicon layer Fulltext Access 7 Pages 2005
MIS-stimulated back-surface passivation of interdigitated back-contacts solar cells Fulltext Access 7 Pages 2005
Performance improvements of crystalline silicon by iterative gettering process for short duration and with the use of porous silicon as sacrificial layer Fulltext Access 7 Pages 2005
Electronic transport properties of the μc-(Si,Ge) alloys prepared by ECR Fulltext Access 7 Pages 2005
Antireflection sub-wavelength gratings fabricated by spin-coating replication Fulltext Access 7 Pages 2005
Simulation of the energy absorption and the resist development at sub-150Â nm ion lithography Fulltext Access 7 Pages 2005
Resist nano-modification technology for enhancing the lithography and etching performance Fulltext Access 7 Pages 2005
Design of low Tg thermosets for short cycle time nanoimprint lithography Fulltext Access 7 Pages 2005
Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar+ Fulltext Access 7 Pages 2005
Building and testing submicrometer metallic (gold) air-bridges for nanotransport applications Fulltext Access 7 Pages 2005
Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision Fulltext Access 7 Pages 2005
Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures Fulltext Access 7 Pages 2005
Characterization of focused electron beam induced carbon deposits from organic precursors Fulltext Access 7 Pages 2005
Influence of the layer thickness and hydrogen dilution on electrical properties of large area amorphous silicon p-i-n solar cell Fulltext Access 7 Pages 2005
Maskless fabrication of nanoelectrode structures with nanogaps by using Ga focused ion beams Fulltext Access 7 Pages 2005
Monolithically integrated micro flow sensor for lab-on-chip applications Fulltext Access 7 Pages 2005
A new and simple probe-based method for preventing charging in focused-ion-beam micro-sampling Fulltext Access 7 Pages 2005
Innovative technologies for high density non-volatile semiconductor memories Fulltext Access 7 Pages 2005