Large-area Co-silicide nanodot arrays produced by colloidal nanosphere lithography and thermal annealing
Keywords: سیلیکون; 81.16.Nd; 61.46.Df; 81.05.Je; 81.40.Ef; 81.16.DnNanosphere lithography; Nanoparticle; Silicide; Annealing; Epitaxy