
MOVPE of AlN-free hexagonal GaN/cubic SiC/Si heterostructures for vertical devices
Keywords: A3 اپیتاکسی فاز بخار فلزی; 61.14.Lj; 72.80.Ey; 81.05.−tA1. Crystal structure; A3. Metalorganic vapor phase epitaxy; B1. Nitrides