
High quality AlGaN epilayers grown on sapphire using SiNx interlayers
Keywords: A3 اپیتاکسی فاز بخار فلزی; A1. Atomic force microscopy; A1. High resolution X-ray diffraction; A1. Photoluminescence; A3. In situ nano-masking; A3. Metalorganic vapor phase epitaxy; B1. Aluminium gallium nitride