Keywords: اچینگ خشک; Dry etching; Nanoporous metallic thin films; Sensor; XeF2;
مقالات ISI اچینگ خشک (ترجمه نشده)
مقالات زیر هنوز به فارسی ترجمه نشده اند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
Keywords: اچینگ خشک; 2D and 3D nanopatterns; Poly(phthalaldehyde); Thermal scanning probe lithography; Etch selectivity; Dry etching;
Keywords: اچینگ خشک; Nanostructures; EBID; Dry etching; Masks;
Keywords: اچینگ خشک; Ion beam; Ion source; End-Hall type; Ion etching; Dry etching; Neutralization
Keywords: اچینگ خشک; Atmospheric pressure; Black silicon; Dry etching; Multicrystalline silicon; Nanotexture; Process simulation; Solar cells; Electron beam induced current (EBIC); Junction depth
Keywords: اچینگ خشک; Surface modification; Dry etching; Laser ablation; Focused ion beam; Rough surfaces; Interface impedance; Reactive ion etching (RIE); Deep reactive ion etching (DRIE);
Keywords: اچینگ خشک; Dry etching; Buffered oxide etchant (BOE); NH3/NF3 etching; Ellipsometry; Plasma enhanced chemical vapor deposition (PECVD);
Keywords: اچینگ خشک; Microneedles; Dry etching; Sputtering; Electroplating
Keywords: اچینگ خشک; Electron-beam lithography; PMMA resist; Dry etching; Spatial 3D-structures;
Keywords: اچینگ خشک; Dry etching; Multi-crystalline silicon; Texture; Reflectance;
Keywords: اچینگ خشک; Photolithography; Polymethyl methacrylate; Dry etching; Proximity effect
Ultra-low rate dry etching conditions for fabricating normally-off field effect transistors on AlGaN/GaN heterostructures
Keywords: اچینگ خشک; Compound semiconductor; Ultra-low rate; Dry etching; AlGaN/GaN HEMT; Recessed gate; GaN-on-sapphire;
Novel method for dry etching CH3NH3PbI3 perovskite films utilizing atmospheric-hydrogen-plasma
Keywords: اچینگ خشک; Perovskite thin film; Atmospheric hydrogen plasma; Metal mask; Dry etching;
Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface
Keywords: اچینگ خشک; 3D nanopatterns; Thermal scanning probe lithography; Ion beam etching; Dry etching; Surface roughness;
Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH)
Keywords: اچینگ خشک; Dry etching; Cobalt thin films; Reaction mechanism;
A review on plasma-etch-process induced damage of HgCdTe
Keywords: اچینگ خشک; Dry etching; Electron cyclotron resonance (ECR); Inductively coupled plasma (ICP); Etch-induced damage; HgCdTe; Type conversion;
Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching
Keywords: اچینگ خشک; Nanoindentation; Contact stiffness; Nanoimprint lithography; Silicon pillar; Dry etching; Cryogenic;
Ion-irradiation damage on GaN p-n junction diodes by inductively coupled plasma etching and its recovery by thermal treatment
Keywords: اچینگ خشک; GaN; p-n Junction; Dry etching; On-resistance; Breakdown;
Effects of 3D microlens transfer into fused silica substrate by CF4/O2 dry etching
Keywords: اچینگ خشک; Microlens; e-Beam patterning; PMMA; Dry etching; Fused silica;
Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O2/Ar gas mixtures
Keywords: اچینگ خشک; Palladium; Dry etching; Methanol; Ethanol; Methane/oxygen; High density plasma; Anisotropy; Etch slope;
Properties of atmosphericâhydrogen-plasma-treated CH3NH3PbI3 perovskite films
Keywords: اچینگ خشک; Atmospheric pressure plasma; Hydrogen; Perovskite; Dry etching;
Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography
Keywords: اچینگ خشک; Self-assembly; Colloidal lithography; Dry etching; Nanofabrication; Vertically arranged silicon nanowire;
Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour
Keywords: اچینگ خشک; Dry etching; Photonic materials; III-V semiconductors; Quantum wells; Luminescence; Defects; Mechanical stress;
A preliminary study of SF6 based inductively coupled plasma etching techniques for beta gallium trioxide thin film
Keywords: اچینگ خشک; β-Ga2O3 thin film; ICP etching; SF6; Dry etching;
Optimization of the nanopore depth to improve the electroluminescence for GaN-based nanoporous green LEDs
Keywords: اچینگ خشک; Gallium nitride; Light-emitting diode; Nanopore; Dry etching; Anodic aluminum oxide
Plasma-activated direct bonding of patterned silicon-on-insulator wafers to diamond-coated wafers under vacuum
Keywords: اچینگ خشک; Diamond; Direct bonding; Dry etching; Plasma activation; Silicon on insulator; Capacitive micromachined ultrasonic transducer
An integrated electroless nickel plating process for fabrication of CMOS-MEMS probe chip
Keywords: اچینگ خشک; CMOS-MEMS; Probe chip; Electroless nickel plating; Dry etching
Etch characteristics of MgO thin films in Cl2/Ar, CH3OH/Ar and CH4/Ar plasmas
Keywords: اچینگ خشک; MgO films; Magnetic random access memory; Dry etching; CH4/Ar gas; Hard mask;
Rapid, Brushless Self-assembly of a PS-b-PDMS Block Copolymer for Nanolithography
Keywords: اچینگ خشک; Self-assembly; PS-b-PDMS; Silicon nanostructures; Solvo-thermal annealing; Brushless; Soft mask template; Dry etching; Pattern transfer; Lines and antidots; Aspect ratio
High rate dry etching of (BiSb)2Te3 film by CH4/H2-based plasma
Keywords: اچینگ خشک; Dry etching; Thermoelectric film; CH4/H2/Ar; Inductively coupled plasma;
Process dependency on threshold voltage of GaN MOSFET on AlGaN/GaN heterostructure
Keywords: اچینگ خشک; GaN MOSFET; AlGaN/GaN heterostructure; Dry etching; Threshold voltage; Nitrogen vacancy
Fabrication and characterization of large-core Yb/Al-codoped fused silica waveguides using dry etching
Keywords: اچینگ خشک; Fused silica; Dry etching; Al doping; Waveguide; Rare-earth doped silica
Comparison of chlorine- and fluorine-based inductively coupled plasmas for dry etching of InGaZnO4 films
Keywords: اچینگ خشک; IGZO; Dry etching; Inductively coupled plasmas; Chlorine-based discharges; Fluorine-based discharges; Etch characteristics; Etch rate; Etch selectivity;
SU-8 etching in inductively coupled oxygen plasma
Keywords: اچینگ خشک; Dry etching; ICP-RIE; SU-8; Antimony; Roughness; SF6;
Tube interconnection in polydimethylsiloxane based fluidic microchannels
Keywords: اچینگ خشک; Polydimethylsiloxane (PDMS); Dry etching; Tube interconnection; Packaging;
Fabrication and characterization of injection molded multi level nano and microfluidic systems
Keywords: اچینگ خشک; Dry etching; Electroplating; Injection molding; Thermal bonding; Lab-on-chip; Microfluidics
Dry Etching of Mo based layers and its interdependence with a poly-Si/MoOxNy/TiN/HfO2 gate stack
Keywords: اچینگ خشک; Dry etching; Mo; MoOx; MoOxNy; TiN/Mo; HBr
Surface pinning of catalyst nanoparticles for enhanced size and position control of 1D nanostructures growth
Keywords: اچینگ خشک; Block-copolymers; Catalyst; CNTs; Dry etching
Selective dry-etching process for fabricating Ge gate-all-around field-effect transistors on Si substrates
Keywords: اچینگ خشک; Ge gate-all-around; High-defect; Dry etching
Negative hybrid sol-gel resist as hard etching mask for pattern transfer with dry etching
Keywords: اچینگ خشک; Hybrid sol-gel; New resist; Dry etching; X-ray lithography; Patterning;
Nanopillars by calcium chloride self-assembly and dry etching
Keywords: اچینگ خشک; Thin films; Texture; Self-assembly; Nanopillars; Dry etching
A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles
Keywords: اچینگ خشک; Nanostructure fabrication technology; Electron beam lithography; Dry etching; Three-dimensional; Nanoparticle; Metamaterial; Optical properties
An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies
Keywords: اچینگ خشک; Titanium; Dry etching; Microstructure
Comparative study on dry etching of α- and β-SiC nano-pillars
Keywords: اچینگ خشک; Nanopillars; Dry etching; Silicon carbide; Polytypes
Direct fabrication of two-dimensional photonic crystal structures in silicon using positive and negative Hydrogen Silsesquioxane (HSQ) patterns
Keywords: اچینگ خشک; Hydrogen Silsesquioxane (HSQ); Electron beam lithography; Photonic crystals; Dry etching; Nanofabrication
The effect of substrate temperature on the etching properties and the etched surfaces of magnetic tunnel junction materials in a CH3OH inductively coupled plasma system
Keywords: اچینگ خشک; Magnetic tunnel junction; Dry etching; CH3OH; Surface analysis;
PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)
Keywords: اچینگ خشک; PMN–PT; Lead magnesium niobate–lead titanate; xPb(Mg1/3Nb2/3)O3-(1 − x)PbTiO3; Piezoelectric single-crystal; Etching; KrF excimer; Exciplex; Laser ablation; Dry etching; Reactive ion etching; DRIE; Inductively coupled plasma; ICP
A direct-write, resistless hard mask for rapid nanoscale patterning of diamond
Keywords: اچینگ خشک; Diamond; Lithography; Hard mask; Focused ion beam; Dry etching; Plasma etching; Nanoindentation
Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching
Keywords: اچینگ خشک; Silicon nanopillar; Cesium chloride self-assembly; Dry etching;
Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching
Keywords: اچینگ خشک; Dry etching; Silicon carbide; ICP-RIE etching; Cl2/Ar gas plasma; Self assembled micro mask; Nanopillar;