
An easy-to-fabricate improved microinstrument for systematically investigating adhesion between MEMS sidewalls
Keywords: فناوری میکرو الکترومکانیکی; 68.35.Np; 82.45.Mp; 85.85.+j; MEMS; Stiction; Sidewall; Adhesion energy; Octadecyltrichloro-silane;